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发明名称
RASTER-INTERFEROMETER FÜR ASPHÄRISCHE OBERFLÄCHEN UND WELLENFRONTEN
摘要
申请公布号
DE60236284(D1)
申请公布日期
2010.06.17
申请号
DE2002636284
申请日期
2002.07.03
申请人
KUECHEL, MICHAEL
发明人
KUECHEL, MICHAEL
分类号
G01B9/02;G01B11/24;G01B11/255;G01M11/02
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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