| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for an inkjet head which reduces cross-talk and has thin drive parts. <P>SOLUTION: The manufacturing method for the inkjet head includes a plurality of chambers, a membrane covering the plurality of chambers, and a plurality of drive parts which are disposed in the manner that the drive parts are distant from each other on the membrane, while a virtual dividing line serves as a boundary, so that pressures are applied to the plurality of chambers. The method includes a step of forming a groove the a surface of a piezoelectric element corresponding to the position of the dividing line, a step of bonding the surface of the piezoelectric element on which the groove is formed with the membrane, and a step of processing the other surface of the piezoelectric element so that the groove is exposed. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
