发明名称 |
BRAKING DEVICE AND METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a braking device and method capable of suppressing a false operation to conduct an automation by accurately detecting the breaking of a substrate. SOLUTION: The braking device 10 letting a blade 52 hit and contact a substrate 1 with a breaking-proposed-line 2 formed to apply a bending stress to break the substrate 1 includes: a load applying part 62 for applying the load to the blade 52; a load measuring part 64 measuring the resultant force F1-F2 of a load F1 applied to the blade 52 by the load applying part 62 and a load F2 applied to the blade 52 by the substrate 1; and a breaking detection unit 70 for detecting the breaking of the substrate 1 by the measurement value of the load measuring part 64. COPYRIGHT: (C)2010,JPO&INPIT |
申请公布号 |
JP2010135484(A) |
申请公布日期 |
2010.06.17 |
申请号 |
JP20080308586 |
申请日期 |
2008.12.03 |
申请人 |
DAITRON TECHNOLOGY CO LTD |
发明人 |
KATO AKI;FUJITA HIROTAKA;MURAYAMA YUSUKE |
分类号 |
H01L21/301 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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