| 发明名称 |
TECHNIQUES FOR PROVIDING A MULTIMODE ION SOURCE |
| 摘要 |
Techniques for providing a multimode ion source are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation, the apparatus including an ion source having a hot cathode and a high frequency plasma generator, wherein the ion source has multiple modes of operation.
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| 申请公布号 |
US2010148088(A1) |
申请公布日期 |
2010.06.17 |
| 申请号 |
US20100708216 |
申请日期 |
2010.02.18 |
| 申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
RADOVANOV SVETLANA;KOO BON-WOONG;SINCLAIR FRANK;BENVENISTE VICTOR M. |
| 分类号 |
H01J27/02 |
主分类号 |
H01J27/02 |
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