SYSTEMS FOR PRODUCING SILICON TETRAFLUORIDE FROM FLUOROSILICATES IN A FLUIDIZED BED REACTOR

摘要

Systems for preparing silicon tetrafluoride by the thermal decomposition of an alkali or alkaline earth-metal fluorosilicate. The system includes a drying apparatus for removing moisture from a fluorosilicate feed; a fluidized bed reactor comprising a reaction chamber for thermal decomposition of fluorosilicate into silicon tetrafluoride gas and an alkali or alkaline earth-metal fluoride; a heater apparatus and an exhaust gas treatment system for treating gases discharged from the fluidized bed reactor.