发明名称 STAMPER, STAMPER TESTING METHOD, AND STAMPER TESTING APPARATUS
摘要 According to one embodiment, a stamper has a data area and servo area, and has concentric or spiral grooves formed in the data area. Phases αE and αH at which differential signal levels of the E- and H-polarized light are maximum when the data area is irradiated with a laser beam have a relationship represented by (αE+αH)≦̸270°
申请公布号 US2010148095(A1) 申请公布日期 2010.06.17
申请号 US20090538638 申请日期 2009.08.10
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 UMEZAWA KAZUYO;MORITA SEIJI;SAKURAI MASATOSHI
分类号 H01L33/00;B29C35/08 主分类号 H01L33/00
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