摘要 |
PROBLEM TO BE SOLVED: To shorten furthermore an inspection time, in an insulation inspection method and an insulation inspection device. SOLUTION: In the state where conductor patterns P1-P40 are grouped into inspection groups G1-G4 to the number of N (in this example, N=4), and as for the insulation state between a first conductor pattern P and a second conductor pattern P in each inspection group G, each first conductor pattern P has mutually the same potential (H-potential) and each second conductor pattern P has mutually the same potential (L-potential) by using inspection probes to the number of N, a first inspection processing for inspecting simultaneously to each inspection group G is executed over a plurality of times (in this example, total 45 times of the first to 45-th times) by changing a connection mode of a pair of inspection probes to each conductor pattern P, and a second inspection processing for inspecting the insulation state between a pair of conductor patterns P in the state where either of the pair of close conductor patterns P among each conductor pattern P grouped into different inspection groups G is set at the H-potential, and the other is set at the L-potential is executed. COPYRIGHT: (C)2010,JPO&INPIT |