发明名称 Ultrasonic Transducer And Manufacturing Method Thereof
摘要 An ultrasonic transducer includes a first electrode, a second electrode, an insulating film disposed between the first and second electrodes, and a cavity disposed between the first and second electrodes. The insulating film includes a projection extending in the cavity, and a portion of the cavity is disposed between the projection and the first electrode. A portion of one of the first electrode and the second electrode has an opening corresponding to a position of the projection of the insulating film when viewed in plan view.
申请公布号 US2010148594(A1) 申请公布日期 2010.06.17
申请号 US20100714631 申请日期 2010.03.01
申请人 MACHIDA SHUNTARO;ENOMOTO HIROYUKI;TADAKI YOSHITAKA;NAGATA TATSUYA 发明人 MACHIDA SHUNTARO;ENOMOTO HIROYUKI;TADAKI YOSHITAKA;NAGATA TATSUYA
分类号 H02N11/00 主分类号 H02N11/00
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