发明名称 |
Substrates for High-Efficiency Thin-Film Solar Cells Based on Crystalline Templates |
摘要 |
A three-dimensional thin-film semiconductor substrate having a plurality of ridges on the surface of the semiconductor substrate which define a base opening of an inverted pyramidal cavity and walls defining the inverted pyramidal cavity is provided. And a fabrication method for a 3-D TFSS by forming a porous silicon layer on a silicon template having a top surface aligned along a (100) crystallographic orientation plane of the silicon template and a plurality of walls each aligned along a (111) crystallographic orientation plane of the silicon template and forming an inverted pyramidal cavity. The porous silicon layer forms substantially conformal on the silicon template. Then forming a substantially conformal epitaxial silicon layer on the porous silicon layer and releasing the epitaxial silicon layer from the silicon template.
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申请公布号 |
US2010148319(A1) |
申请公布日期 |
2010.06.17 |
申请号 |
US20090618663 |
申请日期 |
2009.11.13 |
申请人 |
SOLEXEL, INC. |
发明人 |
WANG DAVID XUAN-QI;MOSLEHI MEHRDAD M. |
分类号 |
H01L29/04;H01L21/20;H01L29/06 |
主分类号 |
H01L29/04 |
代理机构 |
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