<p>An antireflective coating compositions comprising (I) a silsesquioxane resin (II) a compound selected from photo-acid generators and thermal acid generators; and (III) a solvent wherein in the silsesquioxane resin contains a carboxylic acid forming group or a sulfuric acid forming group.</p>
申请公布号
WO2010068338(A1)
申请公布日期
2010.06.17
申请号
WO2009US61131
申请日期
2009.10.19
申请人
DOW CORNING CORPORATION;FU, PENG-FEI;MOYER, ERIC;SUHR, JASON
