| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a differential pressure sensor which can measure minute differential pressure with high precision. Ž<P>SOLUTION: A pressure-sensitive element 2 of the differential pressure sensor includes a thin film 4 with a thickness of 0.1 to 2.0 mm, a pair of electrodes 5 in contact with the thin film 4, and an outer frame 6 for holding the thin film 4. The thin film 4 is formed of dielectric elastic resin and a plurality of coiled carbon fibers dispersed into the elastic resin of 1 to 20 wt.%. The coiled carbon fiber 8 included in the thin film 4 is formed so that its thickness (fiber diameter) is 1 nm to 10 μm, its coil diameter is 1 nm to 100 μm, and its coil length is 150 μm or shorter. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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