| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect a defect having an appearance different from the periphery, accurately at a high speed. Ž<P>SOLUTION: While scanning pixels are scanned one by one in an image of an inspection object, a prescribed number of comparison object pixels 21-23 are set based on set information registered beforehand relative to an attention pixel 20 at every hour, and the comparison object pixels 21-23 are combined successively with the attention pixel 20, and a concentration difference between combined pixels is determined in each combination, and it is determined whether the concentration difference is within a tolerance. When acquiring a determination result wherein the concentration difference is within the tolerance, it is determined that the attention pixel 20 is not a pixel showing a defect, and the attention pixel 20 is shifted to the next position. On the other hand, when a processing to all combinations is finished before acquiring the determination result wherein the concentration difference is within the tolerance, it is determined that the attention pixel 20 is a pixel showing the a defect. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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