| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of suppressing an exposure dose, and shortening a processing time. Ž<P>SOLUTION: An operation part 70 of this X-ray inspection device includes: a step (S412) for irradiating an X-ray (S402) by moving an X-ray focal point to a position corresponding to an X-ray detector 23.1, and imaging by the X-ray detector 23.1; a step (S422) for moving an X-ray detector 23.2 to the next imaging position in parallel, and transferring imaged data by the X-ray detector 23.1 to, for example, a memory 90 for reconstitution processing by a 3D image reconstitution part 78; a step (S424) for irradiating an X-ray (S404) by moving an X-ray focal point to a position corresponding to the X-ray detector 23.2, and imaging by the X-ray detector 23.2; and a step (S414) for moving the X-ray detector 23.1 to the next imaging position in parallel, and transferring imaged data by the X-ray detector 23.2 to the memory 90 for reconstitution processing by the 3D image reconstitution part 78. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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