| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a component for a charged particle device which does not use a brazing material for an electronic source nor an ion source, the introduction of a component improved in the accuracy of a joint location between an extraction electrode and an insulator, and an alignment error of discharged charged particles is reduced, and having a cost advantage owing to the non-use of the brazing material. Ž<P>SOLUTION: The component for a charged particle device composed of a plurality of components of a metal component and an insulating component has a tubular fitting-in section to connect the metal component and the insulating component with an outer tube of the fitting-in section formed of metal and an inner tube of an insulator. An inner size of the outer tube at room temperature is slightly smaller than an outer size of the inner tube and the fitting-in section is formed by connecting the outer tube and the inner tube by thermal shrink fitting. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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