| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge lamp capable of emitting vacuum ultraviolet light with a specific wavelength at high power. SOLUTION: In the microwave discharge lamp where a neon (Ne) gas as a discharge gas is enclosed in a discharge tube, a very small amount (gas concentration N is 5% or less) of a carbon monoxide (CO) gas is added to the Ne gas, and it is enclosed in the discharge tube. Then, the discharge lamp is discharged and light-emitted by supply of microwave power from a microwave oscillator. High-intensity line spectrum can be attained at 156 and 165 nm during electric discharge. COPYRIGHT: (C)2010,JPO&INPIT |
