CONTROL DEVICE FOR INTEGRATED MASTERING SYSTEM

摘要

A method for controlling handling of a plurality of substrates to be processed in an integrated mastering system and an integrated mastering system for performing the method of the invention is provided. The system comprises various treating stations to be passed through by the substrates in a predetermined order, a buffer for temporarily storing the substrates and a handler for moving the substrates between the buffer and the treating stations. According to the method each one of the plurality of substrates is moved to the buffer upon completion of processing in each one of said treating stations.