发明名称 |
MICROWAVE PLASMA SOURCE AND METHOD FOR FORMING A LINEARLY EXTENDED PLASMA UNDER ATMOSPHERIC PRESSURE CONDITIONS |
摘要 |
The invention relates to a microwave plasma source and to a method for forming a linearly extended plasma under atmospheric pressure conditions. The aim of the invention is to provide a possibility for a large-scale modification of substrate surfaces using a plasma formed under atmospheric pressure conditions, wherein constant conditions can be maintained over the entire surface to be modified. For a microwave plasma source according to the invention, at least one plasma outlet nozzle and at least one inlet for a plasma gas are present at a plasma chamber. At least two units, each having at least one magnetron and a slit antenna, are disposed outside of the plasma chamber at two diametrically opposite sides on a plasma chamber having non-rotationally symmetrical cross sections. The magnetrons can be operated in alternating pulsed mode. |
申请公布号 |
WO2010066247(A2) |
申请公布日期 |
2010.06.17 |
申请号 |
WO2009DE01765 |
申请日期 |
2009.12.08 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;ROCH, JULIUS;DANI, INES;KASKEL, STEFAN |
发明人 |
ROCH, JULIUS;DANI, INES;KASKEL, STEFAN |
分类号 |
H05H1/24 |
主分类号 |
H05H1/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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