CATALYST CHEMICAL VAPOR DEPOSITION APPARATUS

摘要

[PROBLEMS] To provide a catalyst chemical vapor deposition apparatus which can prolong the service life of a catalyst wire. [MEANS FOR SOLVING PROBLEMS] A catalyst chemical vapor deposition apparatus (1) comprising a catalyst wire (6), the catalyst wire (6) comprising a tantalum wire and a layer of tantalum boride provided on the surface of the tantalum wire. The boride of the metallic tantalum (tantalum boride) has a larger hardness than the metallic tantalum. Accordingly, the use of the tantalum wire, with the boride layer formed on the surface thereof, as a catalyst wire can reduce thermal expansion of the catalyst wire, can improve the mechanical strength, and can prolong the service life. When electric heating of the catalyst wire (6) is performed by continuous energization, further prolongation of the service life of the catalyst wire (6) can be realized.