发明名称 CARRIER HEAD MEMBRANE
摘要 A flexible membrane includes a horizontal central portion, a vertical portion coupled to the central portion, a thick rim portion coupled to the vertical portion, and an extension coupled to the thick rim portion. An outer surface of the horizontal central portion provides a mounting surface configured to receive a substrate. The thick rim portion has a thickness that is greater than a portion directly adjacent to the thick rim portion. The thick rim portion is between the extension and the vertical portion and a greatest dimension of the extension is less than the thickness of the thick rim portion.
申请公布号 WO2010068813(A2) 申请公布日期 2010.06.17
申请号 WO2009US67578 申请日期 2009.12.10
申请人 APPLIED MATERIALS, INC.;PAIK, YOUNG, J.;BHATNAGAR, ASHISH;NARENDRNATH, KADTHALA, RAMAYA 发明人 PAIK, YOUNG, J.;BHATNAGAR, ASHISH;NARENDRNATH, KADTHALA, RAMAYA
分类号 H01L21/304 主分类号 H01L21/304
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