ROLL-TO-ROLL SPUTTER SYSTEM FOR THE DEPOSITION ON BOTH SIDES OF SUBSTRATE

摘要

The present invention provides a roll-to-roll sputter system for the deposition on both sides of a substrate. The roll-to-roll sputter system comprises: a roll-to-roll system for transporting the substrate to a work space by a roller; a plurality of upper sputter systems for deposition on the upper surface of the substrate; and a plurality of lower sputter systems for deposition on the lower surface of the substrate. The roll-to-roll sputter system for the deposition on both sides of a substrate according to the present invention performs deposition for a plurality of substrates in a quick and easy manner, reducing the amount of labor for workers, thereby shortening work time and improving work efficiency.