| 摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture a ZnO deposition material having excellent composition uniformity while suppressing segregation of rare earth element oxide powder added to ZnO raw material powder, containing ≥2 kinds to ≤17 kinds of rare earth elements, and giving a ZnO film having uniform thickness. <P>SOLUTION: A green sheet is obtained by using raw material mixed power 14 of the ZnO raw material powder 12 with the rare earth element oxide powder 13 containing ≥2 kinds to ≤17 kinds of rare earth elements by the use of a doctor blade method. A green single layered body 19 or a green laminated body 20 or 29 are prepared from the green sheet. The green single layered body 19 or the green laminated body 20 or 29 are fired and then pulverized to prepare mixed powder 25 or 31. The ZnO deposition material 34 comprising a ZnO sintered body containing the rare earth element is manufactured by forming the granulated powder using the mixed powder, molding it and sintering the molded body. <P>COPYRIGHT: (C)2010,JPO&INPIT |
