| 摘要 |
PROBLEM TO BE SOLVED: To provide a small variable capacitance element with small parasitic L, C and R. SOLUTION: The variable capacitance element includes a signal line 1 arranged on a substrate 10, movable electrodes 3a, 3b, 3c arranged to cross over the signal line 1 and with both ends fixed on the substrate 10, and fixed capacitances 4a, 4b, 4c arranged between at least one end of both ends of the movable electrodes 3a, 3b, 3c and the substrate 10. COPYRIGHT: (C)2010,JPO&INPIT |
