发明名称 |
VACUUM VESSEL, VACUUM PROCESSING APPARATUS INCLUDING VACUUM VESSEL, VACUUM VESSEL MANUFACTURING METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD |
摘要 |
A vacuum vessel includes a pair of bending members which are formed by bending metal plates in predetermined shapes and are bonded to each other to form a closed space inside them. The vacuum vessel also includes a sealing member which seals the gap in the bonding portion between the bending members, and a cubic lattice structure which abuts against the inner surfaces of both the bending members and is accommodated in the closed space. The vacuum vessel further includes a magnet unit. The magnet unit fixes the bending members onto the structure and seals the gap in the bonding portion between the bending members by pressing an O-ring serving as a sealing member along the bonding portion.
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申请公布号 |
US2010151119(A1) |
申请公布日期 |
2010.06.17 |
申请号 |
US20090638071 |
申请日期 |
2009.12.15 |
申请人 |
CANON ANELVA CORPORATION |
发明人 |
SASAKI MASAO |
分类号 |
B05D5/12;B23P17/00;B65D81/20;C23C14/00 |
主分类号 |
B05D5/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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