COMPOSITE OXIDE SINTERED BODY AND SPUTTERING TARGET COMPRISING SAME

摘要

A composite oxide sintered body which contains In, Zn, and Sn, and has a density of 90% or more in terms of relative density, an average crystal grain size of 10 µm or less, and a bulk resistivity of 30 mOcm or less, and in which the number of aggregated particles of tin oxide having a diameter of 10 µm or more is 2.5/1.00 mm2 or less.