发明名称 |
INTEGRATION OF A PROCESSING BENCH IN AN INLINE COATING SYSTEM |
摘要 |
An insert apparatus for a substrate coating system, the insert apparatus including: an insert element 100 for being operated within a coating system, the insert element including a processing bench, said processing bench being adapted for receiving a coating tool for applying a coating to a substrate, a carrier 1 10 for carrying the insert element 100, a first positioner 130 collaborating with the carrier 110 for inserting said insert element 100 into a processing chamber 150 of the coating system and/or retracting said insert element 100 from said processing chamber 150, and a second positioner 140 for fine positioning of said insert element 100 within said processing chamber 150. |
申请公布号 |
WO2010067159(A2) |
申请公布日期 |
2010.06.17 |
申请号 |
WO2009IB07615 |
申请日期 |
2009.11.30 |
申请人 |
APPLIED MATERIALS, INC.;HABERKORN, EDGAR;MAURER, PHILIPP |
发明人 |
HABERKORN, EDGAR;MAURER, PHILIPP |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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