发明名称 INTEGRATION OF A PROCESSING BENCH IN AN INLINE COATING SYSTEM
摘要 An insert apparatus for a substrate coating system, the insert apparatus including: an insert element 100 for being operated within a coating system, the insert element including a processing bench, said processing bench being adapted for receiving a coating tool for applying a coating to a substrate, a carrier 1 10 for carrying the insert element 100, a first positioner 130 collaborating with the carrier 110 for inserting said insert element 100 into a processing chamber 150 of the coating system and/or retracting said insert element 100 from said processing chamber 150, and a second positioner 140 for fine positioning of said insert element 100 within said processing chamber 150.
申请公布号 WO2010067159(A2) 申请公布日期 2010.06.17
申请号 WO2009IB07615 申请日期 2009.11.30
申请人 APPLIED MATERIALS, INC.;HABERKORN, EDGAR;MAURER, PHILIPP 发明人 HABERKORN, EDGAR;MAURER, PHILIPP
分类号 H01L21/00 主分类号 H01L21/00
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