REPAIR METHOD FOR DARK SPOT GENERATED SUBSTRATE

摘要

PURPOSE: A repair method for a dark spot generated substrate is provided to repair the short problem between the first and second electrodes due to a metal foreign material, thereby improving production yield. CONSTITUTION: A substrate(110) in which a dark spot is generated is selected. A lift fixing pin(172) fixes the substrate. A piston is mounted inside a susceptor(146). A conductive rod penetrates a conductive liquid layer(148). The substrate is transferred to a repair process chamber(C). The substrate and the conductive liquid layer are touched each other. Opposite voltages are applied to the substrate and the conductive rod.