| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrode member capable of correctly controlling a temperature in a chamber, and a substrate treatment apparatus including the same. SOLUTION: The electrode member for generating plasma includes: an electrode plate; and a cooling unit having a plurality of thermoelectric modules (10) thermally contacting with the electrode plate. The electrode plate has a front surface opposing a generating space for generating plasma and a back surface opposing the front surface, and the thermoelectric modules (10) are arranged on the back surface of the electrode plate. A mounting hole recessed from the back surface is formed at the back surface of the electrode plate, and the thermoelectric modules (10) are mounted to the mounting hole. COPYRIGHT: (C)2010,JPO&INPIT |
