| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a probe card capable of improving accuracy of a mounting position of a probe and shortening the time required in a mounting process. Ž<P>SOLUTION: Connection parts 211 of the plurality of probes 200 are fitted into a form 300 including a plurality of openings 321, respectively. A sacrifice layer 400 surrounding the probes 200 is formed on a surface of the form 300 in this state. Thereafter, the probes 200 surrounded by the sacrifice layer 400 is detached from the form 300 by removing the form 300, the connection parts 211 of the probes 200 are then connected to a plurality of electrode pads 110 on a surface of a substrate 100, respectively. Thereafter, the sacrifice layer 400 is removed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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