| 摘要 |
<p>PURPOSE: A liquid processing method, a liquid processing device, and a storage medium are provided to clean the inside of a multi-valve more efficiently with a rinse solution by discharging the rinse solution, which is inserted into the multi-valve from a rinse solution supplying valve located on one side, from a rinse solution discharging valve located on another side. CONSTITUTION: A maintenance unit(31) supports a obbject(W). A rotating driver(60) rotates the maintenance unit. A chemical solution supplying tool supplies a chemical solution to the object. A rinse solution supplying tool(17) supplies a rinse solution to the object. A gas supplying unit supplies gas to the side of the maintenance unit of the object.</p> |
