发明名称 TEMPERATURE RAISING/LOWERING DEVICE, AND TEST HANDLER INCLUDING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a temperature raising/lowering device, and a test handler including the temperature raising/lowering device, for a semiconductor device or a device of an electronic component or the like wherein space saving and inexpensive high-speed processing of the whole device can be achieved, capable of raising/lowering a temperature of the semiconductor device or the device of the electronic component or the like. SOLUTION: A temperature raising device 11 includes: a discoid table 21 including a plurality of pockets 24 as holding positions for placing a device on the surface, which is provided intermittently rotatably by control of a motor; a temperature raising means 22 for heating the device of the table 21; and a Y-axis driving source 22 for moving the table 21 in the Y-direction in the figure. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010133716(A) 申请公布日期 2010.06.17
申请号 JP20080307062 申请日期 2008.12.02
申请人 UENO SEIKI KK 发明人 MASUDA TAKAYUKI
分类号 G01R31/26 主分类号 G01R31/26
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