| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an MEMS (Micro Electro Mechanical System) which can easily and assuredly remove unnecessary parts in short time. Ž<P>SOLUTION: In the manufacturing method of the MEMS, a first substrate 110 on which a movable part 111 of the MEMS is formed and a second substrate 120 stuck to the first substrate and having an area adjacent to the movable part which is removed by etching. The manufacturing method of the MEMS includes a process for forming a trench 123 in a part of the area of the second substrate desired to be removed by etching before the first substrate is stuck to the second substrate, a process for forming a sacrificial oxide film 121 by thermally oxidizing the area desired to be removed by etching including the part of the trench, a process for sticking the first substrate 110 to the second substrate 120 on which the sacrificial oxide film is formed and a process for simultaneously removing an unnecessary part of the first substrate to form the movable part and the sacrificial oxide film 121 formed on the second substrate by etching, after the first and second substrates are stuck to each other. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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