| 摘要 |
An information processing device includes a first input receiving unit, a second input receiving unit, a window function processing unit, a correlation calculating unit, and an output unit. The first input receiving unit is configured to receive first information including a first time-series data related to a semiconductor process. The second input receiving unit is configured to receive second information including a second time-series data related to the semiconductor process. The window function processing unit is configured to retrieve window acquiring information from the first information during an intended period using a window function. The correlation calculating unit is configured to calculate a cross-correlation function between the window acquiring information retrieved by the window function processing unit and the second information. The output unit is configured to output information corresponding to the cross-correlation function calculated by the correlation calculating unit.
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