申请人 |
APPLIED MATERIALS, INC.;HUA, ZHONG, QIANG;KAMATH, SANJAY;LEE, YOUNG, S.;YIEH, ELLIE, Y.;LE, HIEN-MINH, HUU;PATEL, ANJANA, M.;GONDHALEKAR, SUDHIR, R. |
发明人 |
HUA, ZHONG, QIANG;KAMATH, SANJAY;LEE, YOUNG, S.;YIEH, ELLIE, Y.;LE, HIEN-MINH, HUU;PATEL, ANJANA, M.;GONDHALEKAR, SUDHIR, R. |