ROLL-TO-ROLL SPUTTER SYSTEM FOR COATING TWO SIDED SUBSTRATE

摘要

PURPOSE: A roll-to-roll sputter system for double side substrate evaporation is provided to reduce a processing time by simultaneously evaporating the both sides of a substrate using a top and a lower part sputter system. CONSTITUTION: A roll-to-roll sputter system for double side substrate evaporation comprises a roll-to-roll system, a plurality of top sputter systems, and a plurality of lower part sputter systems. The roll-to-roll system transfers the substrate(220) through roller to the work space. The top sputter system evaporates the upper side of substrate. The lower part sputter system evaporates the lower surface of substrate. The top sputter system and lower part sputter system.