| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent abnormal discharge from occurring between an electrode and a solid dielectric even if the electrode thermally deforms due to discharge, by making compact an electrode structure of a plasma treatment device. <P>SOLUTION: A dielectric member 12 made of a dielectric is put over a discharge face 11a of the electrode 11. A fixing member 13 is set face to face to a rear face 11b of the electrode 11. The fixing member 13 is positioned fixed against the dielectric member 12. Housing recess parts 15 are formed at the rear face 11b and one of the rear-face opposed faces 13b of the fixed member 13, with the other face made flat. A base part 14b of a leaf spring 14 is housed in the housing recess part 15. An elastic contact part 14a of the leaf spring 14 is made in elastic contact with the above flat face. <P>COPYRIGHT: (C)2010,JPO&INPIT |
