发明名称 LIQUID CRYSTAL SHEET CLEANING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a liquid crystal sheet cleaning apparatus in which the consumption of the power, air and pure water used by the apparatus in the operation is remarkably reduced in waiting and the cleaning is immediately started in resume operation. Ž<P>SOLUTION: The liquid crystal sheet cleaning apparatus has a load buffer part 10 and an unload buffer part 50 equipped with a transporting means 15, a roll brush part 20 equipped with a brush cleaning means 25, a bubble jet aqua knife part 30 equipped with a bubble jet means 35, an air knife part 40 equipped with an air jetting means 45, a pure water supply part 60 equipped with a pure water supply control means 64 and an apparatus control part 70 equipped with an apparatus control means 75. The apparatus control means 75 directs to stop all functions except the pure water supply function by a waiting signal in waiting and the pure water supply control means 64 receives the waiting signal and controls the supply of pure water from the pure water supply means 62. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010131509(A) 申请公布日期 2010.06.17
申请号 JP20080309035 申请日期 2008.12.03
申请人 SHIMADA PHYS & CHEM IND CO LTD 发明人 SUZUKI TOSHINOBU;NAGANO MASAHIRO
分类号 B08B1/02;B08B5/02;G02F1/13;H01L21/304 主分类号 B08B1/02
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