| 摘要 |
PROBLEM TO BE SOLVED: To prevent induction of flame and smoke from a clean room device where fire occurs to the other clean room device, in a clean room facility including the plurality of clean room devices. SOLUTION: The clean room facility 1 includes the clean room devices A, B for each supplying air in a ceiling space 10 to a clean room 15 by fan filter units 17 and returning air coming out from the clean room 15 to an underfloor space 21 to the ceiling space 10 again via a return shaft 22. When fire occurs in the clean room device B, the fan filter units 17 installed in the clean room device B are stopped, and air supply from an air supply duct 11 and air discharge to an air exhaust duct 25 with respect to the clean room device B are stopped. The fan filter units 17 installed in the clean room device A where fire does not occur are not stopped, and the operation amount of the fan filter units 17 installed in the clean room A is reduced. COPYRIGHT: (C)2010,JPO&INPIT
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