CHARGED PARTICLE BEAM APPARATUS

摘要

PROBLEM TO BE SOLVED: To reduce wrong operation of a user of an electron microscope on which a specimen holder can be mounted, and to facilitate management of information of a specimen. SOLUTION: Information of the specimen holder or information of a specimen mounted on the specimen holder is stored in a memory inside the specimen holder. The information of the specimen holder is transmitted to the electron microscope by accessing the memory of the specimen holder mounted on the electron microscope, so that the user can use the spacemen holder without mistaking characteristics of the specimen holder and danger of erroneous recording of the specimen information can be reduced. COPYRIGHT: (C)2010,JPO&INPIT