发明名称 INSPECTION APPARATUS AND INSPECTION METHOD
摘要 An inspection apparatus for inspecting a subject (sample) (for example, performing identification or imaging of the subject) using an expansion coefficient with a relatively small amount of data. The inspection apparatus includes a transforming unit that performs a wavelet transform on a terahertz time waveform obtained using a terahertz wave detected by a detecting unit. In addition, the inspection apparatus includes a selecting unit that selects, from a first expansion coefficient in the wavelet transform, a second expansion coefficient stored in advance and included in the first expansion coefficient. Furthermore, the inspection apparatus includes a comparing unit for comparing a first value of the second expansion coefficient with a second value of the second expansion coefficient selected by the selecting unit.
申请公布号 US2010148071(A1) 申请公布日期 2010.06.17
申请号 US20090626251 申请日期 2009.11.25
申请人 CANON KABUSHIKI KAISHA 发明人 SHIODA MICHINORI
分类号 G01J5/02;G01N21/27;G01N21/35;G06F19/00 主分类号 G01J5/02
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