MEASUREMENT METHOD AND MEASUREMENT DEVICE

摘要

A vibrator (5) of a detection device (4) is moved relatively to a plate (3) having a flat surface of a predetermined area so that the vibrating vibrator (5) approaches the surface of an object-to-be-measured (1) which is mounted on the plate (3) until the frequency of vibration is changed.  The position where the vibrator (5) has changed the frequency of vibration is outputted as a contact position where the vibrator (5) is brought into contact with the object-to-be-measured (1).  The position where the vibrator (5) is brought into contact with the object-to-be-measured (1) is compared to the surface position of the plate (3) so as to measure the thickness of the object-to-be-measured (1).