| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a light-emitting diode array, which can uniformize a light emission output even when the array is densified. <P>SOLUTION: The method of manufacturing the light-emitting diode array includes steps of: laminating a semiconductor layer on a substrate 1; forming a plurality of resist layers 100 to align along an X direction on a light emission part forming region 11 of the semiconductor layer; and forming a plurality of mutually-separated island-like light emission parts 10 formed on the semiconductor layer by mesa-etching with the resist layers 100 as masks. The step of forming the resist layers 100 includes a step of forming a width b1 of the resist layer 100 formed in a region α as an end part of the light emission part forming region 11 in the X direction to be smaller than a width b2 of the resist layer 100 formed in a region β except for the end part. <P>COPYRIGHT: (C)2010,JPO&INPIT |
