| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance reliability by safely reducing waste ozone less than a given level, and to reduce facility cost and running cost of a waste ozone treatment apparatus using activated carbon and/or a catalyst. <P>SOLUTION: Exhaust gas 1 containing ozone or the like flows into a flow path 2 and flows into an activated carbon column 4, where gas like ozone contained in the exhaust gas 1 is decomposed by activated carbon. The ozone gas concentration is measured by a gas concentration meter 3 set in the flow path of the decomposed exhaust gas, the exhaust gas containing ozone is diluted with air in a branch flow path 11 into which dilution gas like air flows, and released to the atmosphere by a blower 6. A controlling device 7 transmits 9 an alarm, cuts off 10 inflow of the exhaust gas, switches the gas flow path, and controls 19 the flow of the dilution air, based on the measured value of the gas concentration meter 3, and a regulation value CA of atmospheric releasing ozone and ozone concentration CH causing ignition of the activated carbon, which are set values received from an input means 8. <P>COPYRIGHT: (C)2010,JPO&INPIT |
