| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection apparatus which can apply a desired voltage to a probe easily. Ž<P>SOLUTION: The inspection apparatus for inspecting the electric characteristics of an object to be inspected using a flitting phenomenon includes at least a pair of probes mounted to a probe card, a capacitor, and a switching means for switching as to the capacitor is brought into conduction with which of a wire connected to an external power supply and the at least a pair of probes. The capacitor and the switching means are supported by or built into the probe card or a substrate to which the probe card is mounted. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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