| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a shape measuring apparatus and a shape measuring method capable of removing stray light for accurate shape measurement. Ž<P>SOLUTION: The apparatus includes a pattern element 30 having a grid pattern, a projection for projecting the grid pattern to an object 60 to be measured via the pattern element 30 and a beam splitter 40, an imaging part 70 for imaging the grid pattern projected o the object 60 via the beam splitter 40, and a measuring part 82 for measuring a shape of the object 60 based on a contrast value of an image picked up by the imaging part 70. A 1/4 wavelength plate 50 is provided between the beam splitter 40 and the object 60. Projection light incident to the 1/4 wavelength plate 50 has linear polarization. The apparatus is constituted to cause only the linear polarization with its polarization direction orthogonal to the projection light to be incident to the imaging part 70. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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