摘要 |
<p>Disclosed is a semiconductor wafer testing apparatus that resolves the following problems which arise when semiconductor wafers become larger: (1) complexity of stage acceleration/deceleration control; (2) throughput reduction; and (3) increased vibration of the stage support platform during the stage inversion operation (deterioration in resolution). In the semiconductor wafer testing apparatus for resolving these problems, a wafer is rotated, an electron beam is irradiated onto the rotating wafer from a scanning electron microscope, and secondary electrons emitted from the wafer are detected. The detected secondary electrons are A/D converted by an image processing unit, realigned by an image data realignment unit, and then image-processed for display. As a result, image information of all dies of a wafer can be acquired without a large amount of movement of the stage in the X and the Y directions.</p> |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION;TOBA, TADANOBU;HIRANO, KATSUNORI;SATO, NORIO;OHASHI, MASAHIRO |
发明人 |
TOBA, TADANOBU;HIRANO, KATSUNORI;SATO, NORIO;OHASHI, MASAHIRO |