LARGE AREA GAS SENSOR AND METHOD FOR FABRICATING THE SAME

摘要

PURPOSE: A large area gas sensor and a manufacturing method thereof are provided to reduce the manufacturing costs of a substrate by using a plastic substrate instead of a high priced aluminum substrate. CONSTITUTION: A large area gas sensor comprises: a flexible substrate(200); a double damping layer(210) which is formed on the flexible substrate; a metal electrode(220) which comprises a probe part which is patterned on the double damping layer; and an oxide detection layer(230) which is formed on the metal electrode in which the probe part is excluded. The flexible substrate comprises polyimide, polyethylene, polyethersulfone and polycarbonate. The double damping layer comprises an amorphous silicon layer(211) and an inorganic insulation film layer(212) which are successively formed on the flexible substrate. The inorganic insulation film layer consists of one or more among a group of Al2O3, MgO, SrTiO, and SiO2.