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发明名称
Alternierende Phasenmaske
摘要
申请公布号
DE602005021106(D1)
申请公布日期
2010.06.17
申请号
DE200560021106T
申请日期
2005.10.03
申请人
IMEC
发明人
VAN LOOK, LIEVE;VERHAEGEN, STAF;HENDRICKX, ERIC
分类号
G03F1/00
主分类号
G03F1/00
代理机构
代理人
主权项
地址
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