,申请号JP20020182259-传众专利搜索

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发明名称
摘要
申请公布号	JP4484421(B2)	申请公布日期	2010.06.16
申请号	JP20020182259	申请日期	2002.06.21
申请人		发明人
分类号	C23C14/48;H01L21/265	主分类号	C23C14/48
代理机构		代理人
主权项
地址

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