Method and apparatus for laser machining structures of different sizes by means of two different laser processes

摘要

A new method that uses a common optical system and sequentially creates structures of widely different sizes in a substrate by means of two different laser processes is described. One process uses a laser beam that is tightly focussed on the substrate surface and is used for creating fine groove structures by semi-continuous direct write type beam movement. The second process uses a second laser beam that is used to form a larger size image on the substrate surface and is used to create pads and vias in the substrate in step and drill mode.