CURVATURE DISTRIBUTION CRYSTAL LENS AND X-RAY REFLECTANCE MEASURING INSTRUMENT

摘要

A curvature distribution crystal lens of the present invention is obtained via press-molding. In the case of a Ge (110) single crystal plate, a temperature for the press-molding is in a range 1°C to 120°C lower than a melting point. In the case of a Si (110) single crystal plate, a temperature for the press-molding is in a range 1°C to 200°C lower than a melting point. The curvature distribution crystal lens has a crystal lattice plane forming a 1D cylindrically curved surface or a 1D logarithmically curved surface whose valley is in a direction perpendicular to a direction having a maximum curvature, the direction having the maximum curvature being within 30° from a [001] or [1-10] direction in a (110) plane. As a result, it is possible to make an integrated reflection intensity uniform and to make a half-value width uniform in a wide range. Consequently, it is possible to achieve a curvature distribution crystal lens having a wide incident angle range and a high light focusing accuracy.